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![PDF] MAGNETRON SPUTTERING TECHNIQUE USED FOR COATINGS DEPOSITION; TECHNOLOGIES AND APPLICATIONS | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/4da6275b927c56580827601e3e79048deebfb209/2-Figure1-1.png "PDF] MAGNETRON SPUTTERING TECHNIQUE USED FOR COATINGS DEPOSITION; TECHNOLOGIES AND APPLICATIONS | Semantic Scholar")
PDF] MAGNETRON SPUTTERING TECHNIQUE USED FOR COATINGS DEPOSITION; TECHNOLOGIES AND APPLICATIONS | Semantic Scholar
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Preparation of copper thin film mask by sputtering technique assisted by polymer mask photolithography
